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While working with the customer, EUMETRYS associated with INSPECTROLOGY engineers have participated to the writing of some technical articles that you can find down below.

Here is a short presentation about semiconductor’s world challenges.

• Semi-conducteurs pour les débutants (article)

Eumetrys and Inspectrology engineers have participated in several metrology articles redaction for SPIE to change the measurement techniques over the last years.

• Adaptive RG - SPIE 1999
• Overlay Registration Via Multi Layer Analysis SPIE 2000
• Overlay Metrology Results On Leading Edge Cu Processes SPIE 2002
• Productivity Enhancements In Recipe Creation For Overlay Metrology Measurements SPIE 2002