Photoluminescence tool for concentration (AlGaN), LED characterization, layer thickness and Bow measurements

EUMETRYS, Associated with HORIBA - ETAMAX, distribute several tools for photoluminescence measurement. PLATO is a non-destructive mapping measurement system that uses PL(Photoluminescence) phenomenon. The photoluminescense analysis coupled with different laser sources can be used in multiple application:

• GaN power devices
• AI composition in AIGaN layer
• VCSEL and NIR laser diode
• NIR for optical communications
• VCSEL DBR
• RF GAN
• LEDS
• Yellow PL
• POWER GAN

The PLATO 200 and PLATO 300 can measure wafer from all sizes for Al contents in AlGaN layer, Thin-film thickness of GaN layer and even Bow measurement.

Eumetrys is the exclusive distributor in Europe for ETAMAX product line.


Do not hesitate to contact us to get a technical brochure by clicking here
 

PLIMAD-LED for high resolution characterization of LED and Micro-LED wafers

PLIMA-LED addresses the challenges of LED manufacturing by providing a monitoring and imaging solution that integrates photoluminescence (PL) imaging, automatic optical inspection (AOI), and spectral analysis into a single platform.

The different features are:

• High-speed Micro PL Intensity Mapper with highly sensitive PMT
• Photoluminescence (PL) intensity
• Emission wavelength / peak position
• Spectral uniformity
• Chip-level variations (R/G/B LEDs)
• Defects and non-uniform regions
• Optional reflection or scattering signals
• High-speed Micro PL Intensity Mapper with highly sensitive PMT
• R,G,B chip on wafer & Epi wafer measurement with size of 4″, 6”
• Simultaneous measurement of PL and Reflection (or Scattering) (patented)
• LED chip detection with leakage current
• Micro LED inspection.
• Low intensity, no PL signal, abnormal high PL intensity can be classified
• Chip indexing
• Defect coordinating and reporting
• Microscopic image observation of specific areas
• Spectral characteristics analysis possible by designating a specific area in PL Mapping Data (mapping possible)
• Signal measurement in selective wavelength range using a monochromator is possible (Option)
• Epi wafer inspection

Contact us for more information