Optical metrology for stepper qualification
Automated IVS systems for overlay measurement

ApplicationsStepper Qualification
Stepper Control and Matching
Process Control

In semiconductor, photolithography is the key process step to acquire the targeted technology size. Within photolithography processes, the main equipments are aligners, steppers or scanners. These lithography systems need to deliver daily the perfect drawing for the electronic devices that you want to write onto your substrates.

Qualifying the capability of the photolithography equipment, is a key capability of the IVS optical measurement system.

For large technologies, the IVS system is used to measure CD while the exposure dose vary in order to optimize the stepper dose and exposure.

For advanced technology, the overlay measurements are made at numerous locations of the substrates to qualify the stepper potential variation in stage shift or rotation for instance after a service work done on the lithography equipment.