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Spare-parts for all optical metrology IVS system

Last update: 2015-11-16



Spare part description IVS model
PCB, Matrox 4 board set- ISA/EISA IVS120, IVS130, IVS135, IVS155
PCB, Image Processor IVS165, IVS185
ASSY, FSF IVS120, IVS130, IVS135, IVS155, IVS165, IVS185
Cohu Camera IVS120, IVS130, IVS135, IVS155
Front Surface Focus Assembly IVS120, IVS130, IVS135, IVS155, IVS165, IVS185
Aperture Assembly IVS120, IVS130, IVS135, IVS155, IVS165, IVS185
Prealigner Cybec 3000 IVS130, IVS135
Prealigner IDE SPA 310 IVS155, IVS165
Prealigner Cybeq 2831 IVS120
Stainless End Effector - 6100 IVS120, IVS130, IVS135
Ceramic End Effector - ROB 310 IVS135, IVS155, IVS165, IVS185
Prealigner Controller IVS130, IVS135, IVS155, IVS165, IVS185
Robot Controller IVS130, IVS135, IVS155, IVS165, IVS185
Robot Cybeq 6100 IVS120, IVS130, IVS135
Robot IDE ROB 310 IVS155, IVS165
Stage - Ludl IVS120, IVS130
Stage - Ludl S IVS135, IVS155, IVS165, IVS185


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