Metrology Support Company for a NanoWorld

Optical Metrology System & Support Company at Your Service


EUMETRYS: EUROPEAN Metrology Company for a NanoWorld

Optical metrology IVS system support and service

EUMETRYS is pleased to introduce the new best COO automatic metrology systems for CD, Via, large film thickness and Overlay Registration measurement: the new IVS200 system. This tool is the system of choice for metrology when the factors reliability and flexibility are part of the key advantages required by your facilities.

CD and Overlay metrology measurement System

EUMETRYS is a service company dedicated to support metrology systems for Semiconductor, Compound Semiconductor, MEMs and LEDs factories in Europe.

EUMETRYS, using a large number of years of expertise in Optical Metrology, provides maintenance and applications services for your IVS tools, customer trainings (process and maintenance) and sells Optical metrology systems and spare parts for the MicroelectroMechanical systems (MEMs), Semiconductor, Compound Semiconductor (GaAs, GaN, SiC), and LED (Light Emitting Diode) factories.

IVS tools are wide range of substrates measurement capable


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